Langmuir probe system

Time：2022/6/25 2:19:13　Hits:833

Langmuir probe is a widely used diagnostic device in plasma measurement as an intrusive diagnostic device with high spatial and temporal resolution. Its main function is to measure the ion density, electron temperature, potential and electric field inside the plasma in real time.
The company can provide overall design and customization services for Langmuir probe system for various plasma parameters according to customer needs, including but not limited to:
1. Langmuir probe body with simple or complex structure;
2. Fixed/manual propulsion/electric propulsion Langmuir probe vacuum power structure;
3. Probe system vacuum support and signal vacuum penetration structure;
4. Stabilized DC/low frequency (<10kHz) scanning probe power supply system;
5. Probe signal conditioning circuit system;
6. Signal acquisition system;
7. Data processing system;
8. Control system;
Parameters of Langmuir probe system:
Measuring range of ion density: 1016/m3 ～ 1020/m3
Electronic temperature measurement range: 0.1eV ～ 100eV
Potential measurement range: - 200V – 200V
Spatial resolution: ～ 2mm
Time resolution: ～ 10ms
Applicable plasma environment: microwave excitation, cathode excitation and other types of plasma environment;
Applicable pressure range: 10-5Pa ～ 103Pa